ChatGPT Firefly-RE Optical Microlithographer

The Firefly-RE optical microlithograph is the ideal equipment for research laboratories looking for precision and reliability. Designed to record patterns with resolutions up to 450 nm over a 108 nm mapping grid (54 nm in X2 mode)*, this device combines high-precision mechanical systems with advanced optical design, providing exceptional capabilities for advanced applications.

Advanced Operating Software

The Firefly-RE includes intuitive software with a web interface accessible from any device connected to the network. This software simplifies the operation and calibration of the equipment, and incorporates a remote connection module for diagnostics, updates and operation from our plant. Security is ensured through strong passwords and SSL encrypted communication protocols.

Technical Highlights

• Technology: Digital Mask Projection
• Operating Wavelength: 405 nm
• Printing Area: 100 mm x 100 mm, 160 mm x 160 mm, 200 mm x 200 mm
• Resolution: 450 nm, 600 nm, 900 nm
• Positioning System: Brushless linear motor with high-precision crossed roller guides, bidirectional repeatability of ±30 nm RMS, and position encoders with a resolution of 4.88 nm.
• Autofocus System: Ensures exposure on substrates with variations in their topography.
• Observation Microscope: Equipped with a microscope that allows for sample examination and repositioning procedures if multiple exposures are required.
• Granite Structure: Built on a granite structure to ensure superior mechanical stability.

*The mapping grid and dot size (resolution) vary according to the selected model.

Additional Services

• ChatGPT Remote Diagnosis: Remote Monitoring and Failure Diagnosis Service (RM&FDS) via the Internet for 1 year.

More Information

If you would like to learn more about the Firefly-RE, its capabilities and technical specifications, please do not hesitate to contact us. Our team will be happy to provide you with all the necessary information to help you evaluate how the Firefly-RE can meet your needs.